We have a 108m² class 10000 clean room, which hosts the following equipments: A high sensitivity Raman spectroscopy system (home built), a BF/DF scanning microscopy system (home built), an EMCCD, tunable solid-state lasers, a supercontinuum, a RTC integrating sphere, high precision motorized translation stages, an optical spectrum analyzer, two monochromators, three optical tables with active isolation, an optical microscope, a stereo microscope, long WD high NA objectives, CCD detectors, an ultralow noise current amplifier, an EDFA, an optical fiber cleaver, a radial polarizer, a He-Ne laser, a lock-in amplifier, an oscilloscope, a multimeter, a hotplate stirrer, a syringe pump, Lumercial FDTD Solutions software, and a variety of light analysis, optics, motion control and mechanics.
    We use the following fabrication and characterization facilities frequently: Electron beam lithography, photolithography, focused ion beam milling, optical fiber fusion splice, scanning electron microscope, atomic force microscope, reactive ion etch, inductively coupled plasma etch, sputtering, eletron beam and thermal evaporation, plasma enhanced chemical vapor deposition, rapid thermal processor, oxidation furnace, chemical mechanical polish, ellipsometer, stylus profilometer, optical profilometer and wire bonding.
    We have access to a 56-core processor and the Shanghai Supercompter Center for numerical simulation.